reactivemagnetronsputtering相关论文
Effect of Oxygen Content on Structural and Optical Properties of Single Cu2O Film by Reactive Magnet
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Effects of ambient pressure and gas composition on the microstructure of μc-Si:H thin films prepared
Microcrystalline Si thin films were prepared by hot-filament-assisted reactive magnetron sputtering (RMS).The film cryst......
Effect of oxygen content on structural and optical properties of single Cu2O film by reactive magnet
Cuprous oxide (Cu2O) thin films have been deposited on glass substrate by reactive magnetron sputtering method using Cu ......
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采用射频反应磁控溅射系统，在K9双面抛光玻璃基底上制备氮化铝薄膜，通过实验测试并结合数值拟合计算研究了其他参数保持不变的条件下......
